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MEMS Vibratory Gyroscopes: Structural Approaches to Improve Robustness (MEMS Reference Shelf)
by:Cenk Acar, Andrei Shkel
MEMS Vibratory Gyroscopes provides a solid foundation in the theory and fundamental operational principles of micromachined vibratory rate gyroscopes, and introduces structural designs that provide inherent robustness against structural and environmental variations. In the first part, the dynamics of the vibratory gyroscope sensing element is developed,...
MEMS Vibratory Gyroscopes provides a solid foundation in the theory and fundamental operational principles of micromachined vibratory rate gyroscopes, and introduces structural designs that provide inherent robustness against structural and environmental variations. In the first part, the dynamics of the vibratory gyroscope sensing element is developed, common micro-fabrication processes and methods commonly used in inertial sensor production are summarized, design of mechanical structures for both linear and torsional gyroscopes are presented, and electrical actuation and detection methods are discussed along with details on experimental characterization of MEMS gyroscopes. In the second part, design concepts that improve robustness of the micromachined sensing element are introduced, supported by constructive computational examples and experimental results illustrating the material.
WHAT'S BONUS TIME?
Normally, new semester rental orders are exactly 125 days.
With “Bonus Time” you can order early and get a FREE extension until 12/19*.
It’s our little way of rewarding you early renters for planning ahead.
But do hurry. The “Bonus Time” offer runs out on 8/8 (11PM PST).
* It can take up to 24 hours for the extension to appear in your account after you receive your textbooks.
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